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Abstract:This Presentation discusses :
• What is MEMS Technology ?
• Difference between MEMS Technology and IC manufacturing Technology.
• Three general methods of fabrication of MEMS devices :
1. Surface Micromachining
2. Bulk Micromachining
3. LIGA (Combination of Lithography, Plating, Molding)
It is available in the file which you can download from the link below.
Download Full Paper: Click here
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