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Abstract:MEMS is an enabling technology allowing the development of smart products, augmenting the computational ability of microelectronics with the perception and control capabilities of microsensors and microactuators and expanding the space of possible designs and applications. In this paper we have discussed some of the fabrication techniques and packaging. Some of the obstacles preventing its wider adoption are: Limited Options, Fabrication and Packaging. The MEMS and Nanotechnology Exchange provides services that can help with some of these problems It is available in the file which you can download from the link below.
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