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Abstract:This paper presents the brief introduction of MEMS technology as well as its application area. Micromachined Electro-Mechanical Systems (MEMS), also called Microfabricated Systems (MS), have evoked great interest in the cientific and engineering communities. This is primarily due to several substantive advantages that MEMS offer: orders of magnitude smaller size, better performance than other solutions, possibilities for batch fabrication and cost-effective integration with electronics, etc. It is available in the file which you can download from the link below.
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